Alicat MC Series Mass Flow Controller Manual de usuario Pagina 34
- Pagina / 88
- Tabla de contenidos
- MARCADORES
- Operating Manual 1
- RECALIBRATION 2
- ACCESSORIES 2
- GETTING STARTED 6
- MOUNTING 6
- PLUMBING 7
- POWER AND SIGNAL CONNECTIONS 8
- INPUT SIGNALS 9
- 10
- 10
- 00123.45 14
- SELECT MENU 17
- CONTROL SETUP 18
- GAS SELECT 22
- COMMUNICATION SELECT 23
- MISCELLANEOUS 24
- MANUFACTURER DATA 26
- Three-way Solenoid Valve 27
- MCV Controller 27
- Air Supply 27
- Back-Pressure Control 29
- 29
- (NIST REFPROP 7 database) 38
- BB-9 Multi-Drop 46
- 47
- Accessories 48
- (A 1-1/4” NPT Female process 50
- 2000 slpm controllers.) 50
- 51
- 52
- 53
- MCR-Series: 54
- 0 - 3000 slpm 54
- Range Specic Specications 55
- 56
- 57
- 58
- MCV-Series 60
- All ranges 60
- MCVS-Series 60
- 62
- MCD-Series 64
- 0 - 20 slpm shown 64
- MCRD-Series 64
- 0 - 2000 slpm shown 64
- MCRS-Series: 67
- 0 – 50 slpm 67
- 0 – 100 slpm 67
- 0 – 250 slpm 67
- 69
- MC-1SLPM-PROFIBUS 70
- Rev. No. Description Date 72
- Standard DB9 Pin-out 73
- DB9A Pin-out 74
- DB9N Pin-out 75
- DB9R Pin-out 76
- DB9T Pin-out 77
- DB9U Pin-out 78
- DB15 Pin-Outs 79
- DB15K – Pin-Out “MKS” Style 82
- WARNINGS: 85
- Alicat Scientic, Inc 86
- Tucson, AZ USA 86
- Tel: 520-290-6060 86
- Limited Lifetime Warranty 87
- 7641 N Business Park Drive 88
- Tucson AZ 85743 USA 88
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